Understanding Semiconductor Lithography

Key Takeaways Lithography systems are vital for precise circuit patterning in semiconductor manufacturing. Exposure methods like contact/proximity and projection are utilized to produce desired patterns.  Accurate alignment via global/local marks and interferometry is crucial, and  the light sources used dictate resolution.  Extreme Ultraviolet Light (EUV) enables production of the finest features. Innovations in lithography are […]

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