Precision Manufacturing of Large-Aperture Spherical Lenses
large-aperture spherical lens, optical precision, lens manufacturing, ion beam polishing, magnetorheological finishing, interferometry optics, semiconductor lithography lens

Solutions for the Performance Boundaries of Large-Aperture Spherical Lenses Abstract In the era of rapid advances in optoelectronic technology, large-aperture spherical lenses act as the “core pupil” of modern optical systems. Their performance determines the imaging precision and beam-control capability of high-end equipment—from deep-space telescopes to nanoscale lithography systems. Achieving nanoscale surface accuracy on millimeter-scale […]

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