MEMS Mirrors
Avantier’s MEMS mirrors (Micro-Electro-Mechanical Systems mirrors) are compact, fast, and precise optical MEMS devices designed for dynamic beam steering, scanning, and light modulation. Using micro-scale actuation mechanisms, MEMS mirrors can tilt or rotate at high speeds with low power consumption. These miniature mirrors are ideal for next-generation photonic systems requiring agile and accurate optical control.
Engineered with advanced semiconductor processing, our MEMS mirrors offer excellent reliability and performance for a wide range of optical applications.
Key Applications
- LiDAR Systems for autonomous vehicles and robotics – real-time 3D environment scanning
- Optical Communication Networks – signal routing, switching, and alignment
- AR/VR Display Technology – near-eye projection using MEMS beam steering mirrors
- Biomedical Imaging – fast scanning in OCT (optical coherence tomography) and laser-based diagnostics
- Laser Beam Projection – compact MEMS-based image projection for mobile and industrial systems
Structure & Operating Principle
A typical MEMS scanning mirror includes:
- Mirror Surface: Highly reflective silicon or metal-coated element
- Actuation Mechanism: Electrostatic (standard), electromagnetic, or piezoelectric options
- Torsion Springs: Provide controlled angular deflection and fast response
- Support Substrate: Houses the mechanical structure and interface circuitry
How MEMS Mirrors Work
By applying voltage or current to micro-actuators, the mirror tilts or rotates along one or two axes. This allows for high-speed deflection of incident laser beams, enabling precise scanning or tracking. Our MEMS mirrors support angular ranges from ±5° to ±25° with resonant frequencies up to 30 kHz, ensuring rapid response and high positional accuracy.
Custom MEMS Mirror Solutions
Avantier specializes in custom MEMS optics tailored to your system requirements. Whether you need a specific mirror size, unique scan angle, or specialized coating, we provide design and manufacturing flexibility.
Customization Options:
- Mirror aperture (1–5 mm or custom shapes)
- Electrostatic, electromagnetic, or piezoelectric actuation
- Wavelength-optimized mirror coatings (UV, visible, NIR, IR)
- Field-of-view and scan speed tuning
- Vacuum-compatible or hermetically sealed packaging
- Integrated drive electronics and control interfaces
- Optical design consulting and integration support
Let us help you integrate a high-performance MEMS beam steering mirror into your optical system.
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